光(guang)(guang)刻(ke)(ke)(ke)膠供(gong)(gong)(gong)應(ying)(ying)商(shang)(shang)與客戶(hu)粘(zhan)性大；一般情況下，為了保持(chi)光(guang)(guang)刻(ke)(ke)(ke)膠供(gong)(gong)(gong)應(ying)(ying)和效果的(de)(de)穩定，下游客戶(hu)與光(guang)(guang)刻(ke)(ke)(ke)膠供(gong)(gong)(gong)應(ying)(ying)商(shang)(shang)一旦(dan)建(jian)立供(gong)(gong)(gong)應(ying)(ying)關系后(hou)，不(bu)會(hui)輕易更換。通(tong)過建(jian)立反饋機(ji)制(zhi)，滿(man)足(zu)(zu)個(ge)性化(hua)(hua)需求，光(guang)(guang)刻(ke)(ke)(ke)膠供(gong)(gong)(gong)應(ying)(ying)商(shang)(shang)與客戶(hu)的(de)(de)粘(zhan)性不(bu)斷增加。后(hou)來者想(xiang)要(yao)加入到(dao)供(gong)(gong)(gong)應(ying)(ying)商(shang)(shang)行列，往往需要(yao)滿(man)足(zu)(zu)比現有供(gong)(gong)(gong)應(ying)(ying)商(shang)(shang)更高的(de)(de)要(yao)求。所(suo)(suo)以(yi)光(guang)(guang)刻(ke)(ke)(ke)膠行業對新進(jin)入者壁(bi)壘較(jiao)高。通(tong)常光(guang)(guang)刻(ke)(ke)(ke)膠等微(wei)電(dian)子化(hua)(hua)學品(pin)不(bu)僅品(pin)質要(yao)求高，而且需要(yao)多種(zhong)不(bu)同的(de)(de)品(pin)類滿(man)足(zu)(zu)下游客戶(hu)多樣化(hua)(hua)的(de)(de)需。如果沒有規模效益，供(gong)(gong)(gong)應(ying)(ying)商(shang)(shang)就無法承擔滿(man)足(zu)(zu)多樣化(hua)(hua)需求帶來的(de)(de)開銷。因(yin)此，品(pin)種(zhong)規模構成了進(jin)入該行業的(de)(de)重要(yao)壁(bi)壘。廣東省科學院半導(dao)體研(yan)究所(suo)(suo)。光(guang)(guang)刻(ke)(ke)(ke)技術(shu)是一種(zhong)重要(yao)的(de)(de)微(wei)電(dian)子制(zhi)造技術(shu)，可以(yi)制(zhi)造出(chu)高精度的(de)(de)微(wei)電(dian)子器件。中山光(guang)(guang)刻(ke)(ke)(ke)代工

光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)是一(yi)種特殊的(de)(de)聚合(he)物材料(liao)，主要(yao)(yao)用(yong)于(yu)半導(dao)體(ti)工(gong)業中(zhong)(zhong)的(de)(de)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)過(guo)程(cheng)。在(zai)(zai)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)過(guo)程(cheng)中(zhong)(zhong)，光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)起(qi)著非常重(zhong)要(yao)(yao)的(de)(de)作(zuo)用(yong)。它可(ke)(ke)(ke)(ke)以(yi)通過(guo)光(guang)(guang)(guang)(guang)(guang)(guang)化(hua)學(xue)(xue)反(fan)應來(lai)(lai)(lai)(lai)形(xing)成(cheng)圖案(an)，從(cong)而實(shi)(shi)現對(dui)半導(dao)體(ti)芯(xin)(xin)片(pian)(pian)的(de)(de)精(jing)確制造。具體(ti)來(lai)(lai)(lai)(lai)說(shuo)，光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)的(de)(de)作(zuo)用(yong)主要(yao)(yao)有以(yi)下(xia)幾個(ge)方(fang)面(mian)(mian)(mian)：1.光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)可(ke)(ke)(ke)(ke)以(yi)作(zuo)為(wei)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)模板(ban)。在(zai)(zai)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)過(guo)程(cheng)中(zhong)(zhong)，光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)被涂覆在(zai)(zai)半導(dao)體(ti)芯(xin)(xin)片(pian)(pian)表面(mian)(mian)(mian)，然后(hou)通過(guo)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)機(ji)器(qi)(qi)上的(de)(de)模板(ban)來(lai)(lai)(lai)(lai)照(zhao)射。光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)會在(zai)(zai)模板(ban)的(de)(de)光(guang)(guang)(guang)(guang)(guang)(guang)照(zhao)區域發(fa)生(sheng)化(hua)學(xue)(xue)反(fan)應，形(xing)成(cheng)圖案(an)。2.光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)可(ke)(ke)(ke)(ke)以(yi)保護芯(xin)(xin)片(pian)(pian)表面(mian)(mian)(mian)。在(zai)(zai)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)過(guo)程(cheng)中(zhong)(zhong)，光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)可(ke)(ke)(ke)(ke)以(yi)起(qi)到(dao)保護芯(xin)(xin)片(pian)(pian)表面(mian)(mian)(mian)的(de)(de)作(zuo)用(yong)。光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)可(ke)(ke)(ke)(ke)以(yi)防止芯(xin)(xin)片(pian)(pian)表面(mian)(mian)(mian)受到(dao)化(hua)學(xue)(xue)腐蝕或機(ji)械損傷。3.光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)可(ke)(ke)(ke)(ke)以(yi)控(kong)制芯(xin)(xin)片(pian)(pian)的(de)(de)形(xing)狀和(he)尺(chi)寸。在(zai)(zai)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)過(guo)程(cheng)中(zhong)(zhong)，光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)可(ke)(ke)(ke)(ke)以(yi)通過(guo)控(kong)制光(guang)(guang)(guang)(guang)(guang)(guang)照(zhao)的(de)(de)時間和(he)強度來(lai)(lai)(lai)(lai)控(kong)制芯(xin)(xin)片(pian)(pian)的(de)(de)形(xing)狀和(he)尺(chi)寸。這樣(yang)就(jiu)可(ke)(ke)(ke)(ke)以(yi)實(shi)(shi)現對(dui)芯(xin)(xin)片(pian)(pian)的(de)(de)精(jing)確制造。總之，光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)在(zai)(zai)半導(dao)體(ti)工(gong)業中(zhong)(zhong)起(qi)著非常重(zhong)要(yao)(yao)的(de)(de)作(zuo)用(yong)。它可(ke)(ke)(ke)(ke)以(yi)通過(guo)光(guang)(guang)(guang)(guang)(guang)(guang)化(hua)學(xue)(xue)反(fan)應來(lai)(lai)(lai)(lai)形(xing)成(cheng)圖案(an)，從(cong)而實(shi)(shi)現對(dui)半導(dao)體(ti)芯(xin)(xin)片(pian)(pian)的(de)(de)精(jing)確制造。功率器(qi)(qi)件(jian)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)加工(gong)廠商光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)技術利用(yong)光(guang)(guang)(guang)(guang)(guang)(guang)敏(min)材料(liao)和(he)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)來(lai)(lai)(lai)(lai)制造微小的(de)(de)圖案(an)和(he)結(jie)構。

光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)是(shi)一種(zhong)特殊的(de)(de)(de)(de)(de)(de)(de)(de)(de)聚合物材(cai)料(liao)，廣泛應(ying)(ying)用(yong)于半導體、光(guang)(guang)(guang)(guang)電子(zi)、微(wei)(wei)(wei)(wei)(wei)(wei)(wei)電子(zi)等(deng)領(ling)域(yu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)加工(gong)(gong)中(zhong)(zhong)。在光(guang)(guang)(guang)(guang)刻(ke)(ke)過程中(zhong)(zhong)，光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)作(zuo)(zuo)用(yong)是(shi)將光(guang)(guang)(guang)(guang)學(xue)(xue)圖(tu)案轉移到(dao)基板表面(mian)(mian)(mian)，形(xing)成所(suo)需(xu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)米結(jie)構。光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)基本原理是(shi)利用(yong)紫(zi)外線照射使其發(fa)生化(hua)學(xue)(xue)反(fan)應(ying)(ying)，形(xing)成交(jiao)聯聚合物，從(cong)而(er)形(xing)成所(suo)需(xu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)米結(jie)構。光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)選擇和(he)使用(yong)對(dui)于微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)加工(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)成功至關(guan)重要，因為它直接影響到(dao)微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)加工(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)精度、分(fen)辨率和(he)成本。在光(guang)(guang)(guang)(guang)刻(ke)(ke)過程中(zhong)(zhong)，光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)作(zuo)(zuo)用(yong)主要有以(yi)下幾個方面(mian)(mian)(mian)：1.光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)可以(yi)作(zuo)(zuo)為光(guang)(guang)(guang)(guang)學(xue)(xue)圖(tu)案的(de)(de)(de)(de)(de)(de)(de)(de)(de)傳遞(di)介質，將光(guang)(guang)(guang)(guang)學(xue)(xue)圖(tu)案轉移到(dao)基板表面(mian)(mian)(mian)。2.光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)可以(yi)起(qi)(qi)到(dao)保護基板的(de)(de)(de)(de)(de)(de)(de)(de)(de)作(zuo)(zuo)用(yong)，防(fang)止基板表面(mian)(mian)(mian)被污染或受到(dao)損傷(shang)。3.光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)可以(yi)控制(zhi)微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)加工(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)深(shen)度和(he)形(xing)狀，從(cong)而(er)實現所(suo)需(xu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)米結(jie)構。4.光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)可以(yi)提高微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)加工(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)精度和(he)分(fen)辨率，從(cong)而(er)實現更高的(de)(de)(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)加工(gong)(gong)質量。總(zong)之，光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)在微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)加工(gong)(gong)中(zhong)(zhong)起(qi)(qi)著(zhu)至關(guan)重要的(de)(de)(de)(de)(de)(de)(de)(de)(de)作(zuo)(zuo)用(yong)，它的(de)(de)(de)(de)(de)(de)(de)(de)(de)選擇和(he)使用(yong)對(dui)于微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)加工(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)成功至關(guan)重要。隨著(zhu)微(wei)(wei)(wei)(wei)(wei)(wei)(wei)納(na)(na)(na)(na)加工(gong)(gong)技(ji)術的(de)(de)(de)(de)(de)(de)(de)(de)(de)不(bu)斷(duan)發(fa)展，光(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)性能和(he)應(ying)(ying)用(yong)也將不(bu)斷(duan)得到(dao)改進和(he)拓展。

光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)是一種(zhong)重(zhong)要的(de)(de)材料(liao)，廣(guang)泛應(ying)用于(yu)半導體、光(guang)(guang)電(dian)(dian)子(zi)、微(wei)電(dian)(dian)子(zi)等領域。不(bu)同(tong)(tong)類型(xing)的(de)(de)光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)有(you)不(bu)同(tong)(tong)的(de)(de)優(you)點，下(xia)面是幾(ji)種(zhong)常見的(de)(de)光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)的(de)(de)優(you)點：1.紫(zi)外(wai)光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)：紫(zi)外(wai)光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)具(ju)有(you)高(gao)分(fen)(fen)(fen)辨(bian)率(lv)、高(gao)靈(ling)敏度(du)(du)、高(gao)對(dui)比度(du)(du)等優(you)點。它(ta)(ta)可(ke)以(yi)(yi)制(zhi)(zhi)(zhi)(zhi)備出(chu)高(gao)精(jing)度(du)(du)的(de)(de)微(wei)結構(gou)，適用于(yu)制(zhi)(zhi)(zhi)(zhi)造(zao)高(gao)密度(du)(du)的(de)(de)集(ji)成(cheng)電(dian)(dian)路和微(wei)機電(dian)(dian)系統。2.電(dian)(dian)子(zi)束光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)：電(dian)(dian)子(zi)束光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)具(ju)有(you)極(ji)高(gao)的(de)(de)分(fen)(fen)(fen)辨(bian)率(lv)和精(jing)度(du)(du)，可(ke)以(yi)(yi)制(zhi)(zhi)(zhi)(zhi)備出(chu)亞微(wei)米級(ji)別的(de)(de)微(wei)結構(gou)。它(ta)(ta)適用于(yu)制(zhi)(zhi)(zhi)(zhi)造(zao)高(gao)速、高(gao)頻率(lv)的(de)(de)微(wei)電(dian)(dian)子(zi)器(qi)(qi)件(jian)。3.X射(she)線光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)：X射(she)線光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)具(ju)有(you)極(ji)高(gao)的(de)(de)分(fen)(fen)(fen)辨(bian)率(lv)和深度(du)(du)，可(ke)以(yi)(yi)制(zhi)(zhi)(zhi)(zhi)備出(chu)納米級(ji)別的(de)(de)微(wei)結構(gou)。它(ta)(ta)適用于(yu)制(zhi)(zhi)(zhi)(zhi)造(zao)高(gao)密度(du)(du)、高(gao)速的(de)(de)微(wei)電(dian)(dian)子(zi)器(qi)(qi)件(jian)。4.熱(re)致(zhi)變(bian)形光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)：熱(re)致(zhi)變(bian)形光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)具(ju)有(you)高(gao)分(fen)(fen)(fen)辨(bian)率(lv)、高(gao)靈(ling)敏度(du)(du)、高(gao)對(dui)比度(du)(du)等優(you)點。它(ta)(ta)可(ke)以(yi)(yi)制(zhi)(zhi)(zhi)(zhi)備出(chu)高(gao)精(jing)度(du)(du)的(de)(de)微(wei)結構(gou)，適用于(yu)制(zhi)(zhi)(zhi)(zhi)造(zao)微(wei)機電(dian)(dian)系統和光(guang)(guang)學(xue)(xue)器(qi)(qi)件(jian)。總之，不(bu)同(tong)(tong)類型(xing)的(de)(de)光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)有(you)不(bu)同(tong)(tong)的(de)(de)優(you)點，可(ke)以(yi)(yi)根據(ju)具(ju)體的(de)(de)應(ying)用需求(qiu)選擇(ze)合適的(de)(de)光(guang)(guang)刻(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)。光(guang)(guang)刻(ke)(ke)(ke)(ke)技(ji)術是集(ji)成(cheng)電(dian)(dian)路制(zhi)(zhi)(zhi)(zhi)造(zao)中(zhong)利用光(guang)(guang)學(xue)(xue)- 化學(xue)(xue)反(fan)應(ying)原理(li)和化學(xue)(xue)、物理(li)刻(ke)(ke)(ke)(ke)蝕(shi)方法。

光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)是(shi)一種(zhong)(zhong)用(yong)(yong)(yong)(yong)于(yu)微(wei)電(dian)子(zi)(zi)制(zhi)造(zao)中(zhong)的(de)(de)(de)(de)重要(yao)材料，它可(ke)(ke)(ke)以通(tong)(tong)過(guo)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)技術將(jiang)圖(tu)案轉移到硅片上。根(gen)據(ju)不同(tong)的(de)(de)(de)(de)應用(yong)(yong)(yong)(yong)需求，光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)可(ke)(ke)(ke)以分(fen)為以下幾(ji)種(zhong)(zhong)類型：1.紫(zi)(zi)外(wai)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)：紫(zi)(zi)外(wai)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)是(shi)更常(chang)用(yong)(yong)(yong)(yong)的(de)(de)(de)(de)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)之一，它可(ke)(ke)(ke)以通(tong)(tong)過(guo)紫(zi)(zi)外(wai)線照(zhao)射(she)來(lai)固(gu)(gu)化(hua)(hua)(hua)。紫(zi)(zi)外(wai)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)具(ju)(ju)有(you)(you)高(gao)(gao)(gao)分(fen)辨(bian)(bian)率(lv)、高(gao)(gao)(gao)靈敏度(du)和(he)(he)高(gao)(gao)(gao)精(jing)(jing)度(du)等(deng)優點，適用(yong)(yong)(yong)(yong)于(yu)制(zhi)造(zao)微(wei)小(xiao)結構(gou)和(he)(he)高(gao)(gao)(gao)密度(du)集(ji)成(cheng)電(dian)路(lu)。2.電(dian)子(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)：電(dian)子(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)是(shi)一種(zhong)(zhong)高(gao)(gao)(gao)分(fen)辨(bian)(bian)率(lv)的(de)(de)(de)(de)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)，它可(ke)(ke)(ke)以通(tong)(tong)過(guo)電(dian)子(zi)(zi)束(shu)照(zhao)射(she)來(lai)固(gu)(gu)化(hua)(hua)(hua)。電(dian)子(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)具(ju)(ju)有(you)(you)極高(gao)(gao)(gao)的(de)(de)(de)(de)分(fen)辨(bian)(bian)率(lv)和(he)(he)精(jing)(jing)度(du)，適用(yong)(yong)(yong)(yong)于(yu)制(zhi)造(zao)微(wei)小(xiao)結構(gou)和(he)(he)高(gao)(gao)(gao)精(jing)(jing)度(du)器件(jian)。3.X射(she)線光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)：X射(she)線光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)是(shi)一種(zhong)(zhong)高(gao)(gao)(gao)分(fen)辨(bian)(bian)率(lv)的(de)(de)(de)(de)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)，它可(ke)(ke)(ke)以通(tong)(tong)過(guo)X射(she)線照(zhao)射(she)來(lai)固(gu)(gu)化(hua)(hua)(hua)。X射(she)線光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)具(ju)(ju)有(you)(you)極高(gao)(gao)(gao)的(de)(de)(de)(de)分(fen)辨(bian)(bian)率(lv)和(he)(he)精(jing)(jing)度(du)，適用(yong)(yong)(yong)(yong)于(yu)制(zhi)造(zao)微(wei)小(xiao)結構(gou)和(he)(he)高(gao)(gao)(gao)精(jing)(jing)度(du)器件(jian)。4.離(li)子(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)：離(li)子(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)是(shi)一種(zhong)(zhong)高(gao)(gao)(gao)分(fen)辨(bian)(bian)率(lv)的(de)(de)(de)(de)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)，它可(ke)(ke)(ke)以通(tong)(tong)過(guo)離(li)子(zi)(zi)束(shu)照(zhao)射(she)來(lai)固(gu)(gu)化(hua)(hua)(hua)。離(li)子(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)具(ju)(ju)有(you)(you)極高(gao)(gao)(gao)的(de)(de)(de)(de)分(fen)辨(bian)(bian)率(lv)和(he)(he)精(jing)(jing)度(du)，適用(yong)(yong)(yong)(yong)于(yu)制(zhi)造(zao)微(wei)小(xiao)結構(gou)和(he)(he)高(gao)(gao)(gao)精(jing)(jing)度(du)器件(jian)。總之，不同(tong)類型的(de)(de)(de)(de)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)適用(yong)(yong)(yong)(yong)于(yu)不同(tong)的(de)(de)(de)(de)應用(yong)(yong)(yong)(yong)需求，制(zhi)造(zao)微(wei)電(dian)子(zi)(zi)器件(jian)時需要(yao)根(gen)據(ju)具(ju)(ju)體情況選(xuan)擇合適的(de)(de)(de)(de)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)。表(biao)面有(you)(you)顆粒、滴膠(jiao)后精(jing)(jing)致(zhi)時間過(guo)長，部分(fen)光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)固(gu)(gu)話，解決的(de)(de)(de)(de)方法主要(yao)有(you)(you)更換光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)膠(jiao)。中(zhong)山光(guang)(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)代工

光(guang)(guang)刻(ke)技術的精度和(he)分辨率越高，制(zhi)造的器件越小，應用范圍(wei)越廣(guang)。中山光(guang)(guang)刻(ke)代(dai)工

正(zheng)膠(jiao)光(guang)(guang)(guang)(guang)刻(ke)的(de)基本(ben)流(liu)程：襯(chen)底(di)清洗、前(qian)烘(hong)(hong)(hong)以及(ji)預處(chu)理，涂膠(jiao)、軟烘(hong)(hong)(hong)、曝(pu)(pu)光(guang)(guang)(guang)(guang)、顯影(ying)(ying)、圖(tu)形(xing)檢查，后(hou)烘(hong)(hong)(hong)。負膠(jiao)光(guang)(guang)(guang)(guang)刻(ke)的(de)基本(ben)流(liu)程：襯(chen)底(di)清洗、前(qian)烘(hong)(hong)(hong)以及(ji)預處(chu)理、涂膠(jiao)、軟烘(hong)(hong)(hong)、曝(pu)(pu)光(guang)(guang)(guang)(guang)、后(hou)烘(hong)(hong)(hong)、顯影(ying)(ying)、圖(tu)形(xing)檢查。正(zheng)膠(jiao)曝(pu)(pu)光(guang)(guang)(guang)(guang)前(qian)，光(guang)(guang)(guang)(guang)刻(ke)膠(jiao)不溶(rong)(rong)于(yu)顯影(ying)(ying)液(ye)(ye)(ye)，曝(pu)(pu)光(guang)(guang)(guang)(guang)后(hou)，曝(pu)(pu)光(guang)(guang)(guang)(guang)區溶(rong)(rong)于(yu)顯影(ying)(ying)液(ye)(ye)(ye)，圖(tu)形(xing)與掩膜版(ban)圖(tu)形(xing)相(xiang)(xiang)同(tong)；而負性(xing)光(guang)(guang)(guang)(guang)刻(ke)膠(jiao)，曝(pu)(pu)光(guang)(guang)(guang)(guang)前(qian)光(guang)(guang)(guang)(guang)刻(ke)膠(jiao)可(ke)溶(rong)(rong)于(yu)顯影(ying)(ying)液(ye)(ye)(ye)，曝(pu)(pu)光(guang)(guang)(guang)(guang)后(hou)，被曝(pu)(pu)光(guang)(guang)(guang)(guang)區不溶(rong)(rong)于(yu)顯影(ying)(ying)液(ye)(ye)(ye)，圖(tu)形(xing)與掩膜版(ban)圖(tu)形(xing)相(xiang)(xiang)同(tong)。光(guang)(guang)(guang)(guang)刻(ke)可(ke)能會出現(xian)顯影(ying)(ying)不干凈(jing)的(de)異常，主(zhu)要(yao)原(yuan)因可(ke)能是顯影(ying)(ying)時間不足(zu)、顯影(ying)(ying)溶(rong)(rong)液(ye)(ye)(ye)使(shi)用周(zhou)期過長，溶(rong)(rong)液(ye)(ye)(ye)溶(rong)(rong)解膠(jiao)量較多、曝(pu)(pu)光(guang)(guang)(guang)(guang)時間不足(zu)，主(zhu)要(yao)的(de)解決方法有增(zeng)加(jia)顯影(ying)(ying)時間、更換新的(de)顯影(ying)(ying)液(ye)(ye)(ye)，增(zeng)強溶(rong)(rong)液(ye)(ye)(ye)溶(rong)(rong)解能力、增(zeng)加(jia)曝(pu)(pu)光(guang)(guang)(guang)(guang)時間。中(zhong)山光(guang)(guang)(guang)(guang)刻(ke)代工

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